Special Process

Fine Hole Drilling

  • — Equipped with a high-RPM fine hole drilling machine and a high-magnification projector 17 for dimensional inspection.

Anodization

  • — Low-temp hard anode oxidation
  • — High-temp DI water Sealing

Bonding Process

  • — Bonding in class 1000 clean room
  • — Torque test & shear test after bonding

Hot Spray

  • — Al2O3, Y2O3, ZrO2, and various material hot spray coating

Simulation Tester

  • — Self-developed PECVD and WCVD simulation tester for heater reliability verification

A qualified supplier for semiconductor equipment manufacturers.
A major supplier of CMP consumable components - Retaining Ring.

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