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Products

 
ASM
ASM Eagle Family CVD Kits
  • Capable of manufacturing both 200mm Eagle 10 & 300mm Eagle 12 CVD tools parts
  • Both top plate and one body available
  • Cost saving
  • field qualified
Novellus CVD Kits
  • Capable of manufacturing both 150mm & 200mm Altus CVD tools parts
  • Cost saving
  • Field qualified
All Range Ebara RR & GR
  • Compatible for Applied Materials 200mm & 300mm CMP Toolsand Ebara 200mm & 300mm CMP Tools
  • Longer life time
  • Cost saving
Innovative long lifetime RR
  • Parts for etching, CVD, PVD are all availble
  • Cost saving
  • Field qualified
susceptor
Susceptor
  • Experienced manufacture at susceptor (more than 10,000 sets sales record)
  • High quality
  • Cost saving