Product
CVD Shower Plate
CVD Heater
CVD Chamber Kits
Susceptor
Retaining Ring
Collimator
Ceramic Susceptor
Etch G.D.P.
Etch Side Trays
Technology
Electrostatic Chuck(ESC)
Product & Technology
Susceptor
‧Material:
Aluminum +Ceramic
‧Size:
125mm、150mm、200mm
‧Explain:
Supply refurbished susceptor and P-Chuck for P5000 tool
Copyright© 2012 Duratek, Inc. All Rights Reserved.
TEL:886-6-5053050 | FAX:886-6-5053070
No.320, Sec. 1, Huandong Road, Tainan Science-Based Industrial Park, Tainan, Taiwan
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